Scientific journal
Bulletin of Higher Educational Institutions
North Caucasus region

TECHNICAL SCIENCES


UNIV. NEWS. NORTH-CAUCAS. REG. TECHNICAL SCIENCES SERIES. 2022; 1: 66-72

 

http://dx.doi.org/10.17213/1560-3644-2022-1-66-72

 

TARGET POISONING EFFECT DURING DC MAGNETRON SPUTTERING ON TiOx COATINGS MORPHOLOGY AND PHASE COMPOSITION

Krivonozhko E.V., Vashchilin V.S., Min’ko N.I., Lazareva E.A.

Krivonozhko Egor V. Graduate Student, Department «Glass and Ceramics Technologies», Belgorod State Technological University named after V.G. Shukhov, Belgorod, Russia. kev1_96@mail.ru

Vashchilin Vladimir S. Candidate of Biological Sciences, Associate Professor, Department «Physics», Belgorod State Technological University named after V.G. Shukhov, Belgorod, Russia. vvs25@yandex.ru

Min’ko Nina I.– Doctor of Technical Sciences, Professor, Department «Glass and Ceramics Technologies», Belgorod State Technological University named after V.G. Shukhov, Belgorod, Russia. minjko_n_i@mail.ru

Lazareva Elena A. – Candidate of Technical Sciences, Associate Professor, Head of the Department «Design», Platov South-Russian State Polytechnic University (NPI), Novocherkassk, Russia. lazarewa_urgtu@mail.ru

 

Abstract

The article is devoted to artificial TiOx coatings with photocatalytic properties. The research aim is to study the pattern of the crystalline phase nucleation and behavior during the growth in the range of O2 concentration in plasma close to the target poisoning. The magnetron method advantages are briefly listed. The anatase phase preference for photocatalytic application is confirmed with quantitative data. The factors influencing the phase composition and surface morphology of TiOx coatings are listed in detail. The materials, the creation technique and investigation methods of coatings are described. The coatings deposition parameters are given in detail. The study results are shown in the form of X-ray diffraction patterns and micrographs with corresponding descriptions. The values of the average thickness of the coatings and the amplitude thickness of their individual layers are indicated. The average values of the crystals and their agglomerates sizes, the ratio of small and large agglomerates number, as well as numerical data on the mutual agglomerates arrangement on the coatings surface are also given. Conclusions about the main similarities and differences of TiOx coatings obtained by DC magnetron sputtering using poisoned targets and subjected with argon plasma cleaning, are drawn.

 

Keywords: magnetron deposition, target poisoning, titanium dioxide, agglomerates, nanocrystals, anatase, rutile, glass

 

Full text: [in elibrary.ru]

 

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